"Automatized failure analysis of tungsten coated TSVs via scanning acoustic ..."

Eva Grünwald et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.075

access: closed

type: Journal Article

metadata version: 2022-03-23

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Eva Grünwald, Jördis Rosc, René Hammer, Peter Czurratis, Matthias Koch, Jochen Kraft, Franz Schrank, Roland Brunner:
Automatized failure analysis of tungsten coated TSVs via scanning acoustic microscopy. Microelectron. Reliab. 64: 370-374 (2016)

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