"Observation of impurity diffusion defect in IGBT using a laser terahertz ..."

Yasunori Goto, Toru Matsumoto, Kiyoshi Nikawa (2013)

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DOI: 10.1016/J.MICROREL.2013.07.075

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yasunori Goto, Toru Matsumoto, Kiyoshi Nikawa:
Observation of impurity diffusion defect in IGBT using a laser terahertz emission microscope technique. Microelectron. Reliab. 53(9-11): 1370-1374 (2013)

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