"Effects of electron beam generated in vacuum photo-thermal processing on ..."

Gady Golan, Alex Axelevitch, E. Rabinovitch (2001)

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DOI: 10.1016/S0026-2714(01)00019-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gady Golan, Alex Axelevitch, E. Rabinovitch:
Effects of electron beam generated in vacuum photo-thermal processing on metal-silicon contacts. Microelectron. Reliab. 41(6): 871-879 (2001)

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