"Post deposition annealing studies of lanthanum aluminate and ceria high-k ..."

S. F. Galata et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.023

access: closed

type: Journal Article

metadata version: 2020-11-05

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S. F. Galata, E. K. Evangelou, Yerassimos Panayiotatos, A. Sotiropoulos, Athanasios Dimoulas:
Post deposition annealing studies of lanthanum aluminate and ceria high-k dielectrics on germanium. Microelectron. Reliab. 47(4-5): 532-535 (2007)

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