"Polysilicon oxide quality optimization at Wafer level of a ..."

Xavier Gagnard, Yannick Rey-Tauriac, Olivier Bonnaud (2001)

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DOI: 10.1016/S0026-2714(01)00213-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xavier Gagnard, Yannick Rey-Tauriac, Olivier Bonnaud:
Polysilicon oxide quality optimization at Wafer level of a Bipolar/CMOS/DMOS technology. Microelectron. Reliab. 41(9-10): 1335-1340 (2001)

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