"Fast atom bombardment onto vertically aligned multi-walled carbon nanotube ..."

Masahisa Fujino et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.09.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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Masahisa Fujino, Ikuo Soga, Daiyu Kondo, Yoshikatsu Ishizuki, Taisuke Iwai, Tadatomo Suga:
Fast atom bombardment onto vertically aligned multi-walled carbon nanotube bumps to achieve low interconnect resistance with Au layer. Microelectron. Reliab. 55(12): 2560-2564 (2015)

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