"Intrinsic stress analysis of tungsten-lined open TSVs."

Lado Filipovic et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.014

access: closed

type: Journal Article

metadata version: 2023-09-30

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Lado Filipovic, Anderson Pires Singulani, Frederic Roger, Sara Carniello, Siegfried Selberherr:
Intrinsic stress analysis of tungsten-lined open TSVs. Microelectron. Reliab. 55(9-10): 1843-1848 (2015)

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