"Electrical characterization of hafnium oxide and hafnium-rich silicate ..."

Salvador Dueñas et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.11.052

access: closed

type: Journal Article

metadata version: 2023-11-04

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Salvador Dueñas, Helena Castán, Héctor García, J. Barbolla, Kaupo Kukli, Jaan Aarik, Mikko Ritala, Markku Leskelä:
Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition. Microelectron. Reliab. 45(5-6): 949-952 (2005)

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