"Quality assessment of thin oxides using constant and ramped stress ..."

Gunnar Diestel et al. (2001)

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DOI: 10.1016/S0026-2714(01)00061-0

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type: Journal Article

metadata version: 2021-02-11

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Gunnar Diestel, Andreas Martin, Martin Kerber, Alfred Schlemm, Horst Erlenmaier, Bernhard Murr, Andreas Preussger:
Quality assessment of thin oxides using constant and ramped stress measurements. Microelectron. Reliab. 41(7): 1019-1022 (2001)

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