"Effect of electron irradiation on morphological, compositional and ..."

Shounak De et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.007

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type: Journal Article

metadata version: 2022-10-02

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Shounak De, B. Satyanarayana, Ganesh Sanjeev, K. Ramakrishna, K. Mohan Rao, Manjunatha Pattabi:
Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics. Microelectron. Reliab. 54(12): 2740-2746 (2014)

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