"Modeling secondary electron images for linewidth measurement by critical ..."

Mauro Ciappa et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.120

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type: Journal Article

metadata version: 2022-10-02

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Mauro Ciappa, Alexander Koschik, Maurizio Dapor, Wolfgang Fichtner:
Modeling secondary electron images for linewidth measurement by critical dimension scanning electron microscopy. Microelectron. Reliab. 50(9-11): 1407-1412 (2010)

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