"Exploring the limits of scanning electron microscopy for the metrology of ..."

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov (2014)

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DOI: 10.1016/J.MICROREL.2014.07.041

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov:
Exploring the limits of scanning electron microscopy for the metrology of critical dimensions of photoresist structures in the nanometer range. Microelectron. Reliab. 54(9-10): 2123-2127 (2014)

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