"Exact 3D simulation of Scanning Electron Microscopy images of ..."

Mauro Ciappa, Alexey Yu. Illarionov, Emre Ilgünsatiroglu (2014)

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DOI: 10.1016/J.MICROREL.2014.07.033

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mauro Ciappa, Alexey Yu. Illarionov, Emre Ilgünsatiroglu:
Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields. Microelectron. Reliab. 54(9-10): 2081-2087 (2014)

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