"Monte Carlo simulation of emission site, angular and energy distributions ..."

Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov (2012)

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DOI: 10.1016/J.MICROREL.2012.06.091

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mauro Ciappa, Emre Ilgünsatiroglu, Alexey Yu. Illarionov:
Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies. Microelectron. Reliab. 52(9-10): 2139-2143 (2012)

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