"Reliability of vacuum packaged MEMS gyroscopes."

S. H. Choa (2005)

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DOI: 10.1016/J.MICROREL.2004.05.028

access: closed

type: Journal Article

metadata version: 2020-02-22

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S. H. Choa:
Reliability of vacuum packaged MEMS gyroscopes. Microelectron. Reliab. 45(2): 361-369 (2005)

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