"Failure analysis on 14 nm FinFET devices with ESD CDM failure."

Shaalini Chithambaram et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.105

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shaalini Chithambaram, Pik Kee Tan, Yuzhe Zhao, Binghai Liu, Yinzhe Ma, Alfred Quah, Dayanand Nagalingam, Yanlin Pan, Zhihong Mai:
Failure analysis on 14 nm FinFET devices with ESD CDM failure. Microelectron. Reliab. 88-90: 321-333 (2018)

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