"Application of Scanning Capacitance Microscopy on SOI device with wafer ..."

Changqing Chen et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.07.014

access: closed

type: Journal Article

metadata version: 2021-12-21

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Changqing Chen, Ghim Boon Ang, Peng Tiong Ng, Francis Rivai, Soh Ping Neo, Dayanand Nagalingam, Kim Hong Yip, Jeffery Lam, Zhihong Mai:
Application of Scanning Capacitance Microscopy on SOI device with wafer edge low yield pattern. Microelectron. Reliab. 76-77: 141-144 (2017)

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