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"Overview of low temperature hydrophilic Ge to Si direct bonding for ..."
Ki Yeol Byun, Cindy Colinge (2012)
- Ki Yeol Byun, Cindy Colinge:
Overview of low temperature hydrophilic Ge to Si direct bonding for heterogeneous integration. Microelectron. Reliab. 52(2): 325-330 (2012)
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