"Lock-in thermal IR imaging using a solid immersion lens."

O. Breitenstein et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.027

access: closed

type: Journal Article

metadata version: 2024-05-07

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O. Breitenstein, Frank Altmann, Thorsten Riediger, D. Karg, V. Gottschalk:
Lock-in thermal IR imaging using a solid immersion lens. Microelectron. Reliab. 46(9-11): 1508-1513 (2006)

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