"Optimization of WSi2 by SiH4 CVD: impact on oxide ..."

Daniela Brazzelli, Gabriella Ghidini, C. Riva (2001)

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DOI: 10.1016/S0026-2714(01)00057-9

access: closed

type: Journal Article

metadata version: 2021-02-02

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Daniela Brazzelli, Gabriella Ghidini, C. Riva:
Optimization of WSi₂ by SiH₄ CVD: impact on oxide quality. Microelectron. Reliab. 41(7): 1003-1006 (2001)

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