"Charging mechanisms in Y2O3 dielectric films for ..."

Dimitrios Birmpiliotis et al. (2018)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2018.07.087

access: closed

type: Journal Article

metadata version: 2022-10-02

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/BirmpiliotisKKP18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/BirmpiliotisKKP18
Dimitrios Birmpiliotis, Matroni Koutsoureli, J. Kohylas, George J. Papaioannou, A. Ziaei:
Charging mechanisms in Y₂O₃ dielectric films for MEMS capacitive switches. Microelectron. Reliab. 88-90: 840-845 (2018)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.