"Lift-out techniques coupled with advanced TEM characterization methods for ..."

N. Bicaïs-Lépinay et al. (2002)

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DOI: 10.1016/S0026-2714(02)00224-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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N. Bicaïs-Lépinay, F. André, R. Pantel, S. Jullian, Alain Margain, L. F. Tz. Kwakman:
Lift-out techniques coupled with advanced TEM characterization methods for electrical failure analysis. Microelectron. Reliab. 42(9-11): 1747-1752 (2002)

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