"Degradation behavior of Ta2O5 stacks and its ..."

Elena Atanassova, Ninoslav Stojadinovic, Albena Paskaleva (2008)

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DOI: 10.1016/J.MICROREL.2008.07.006

access: closed

type: Journal Article

metadata version: 2020-10-26

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Elena Atanassova, Ninoslav Stojadinovic, Albena Paskaleva:
Degradation behavior of Ta₂O₅ stacks and its dependence on the gate electrode. Microelectron. Reliab. 48(8-9): 1193-1197 (2008)

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