"Metal gates and gate-deposition-induced defects in ..."

Elena Atanassova, Dencho Spassov, Albena Paskaleva (2007)

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DOI: 10.1016/J.MICROREL.2006.10.001

access: closed

type: Journal Article

metadata version: 2024-11-26

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Elena Atanassova, Dencho Spassov, Albena Paskaleva:
Metal gates and gate-deposition-induced defects in Ta₂O₅ stack capacitors. Microelectron. Reliab. 47(12): 2088-2093 (2007)

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