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"Breakdown fields and conduction mechanisms in thin ..."

Elena Atanassova, Albena Paskaleva (2002)

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DOI: 10.1016/S0026-2714(01)00248-7

access: closed

type: Journal Article

metadata version: 2020-10-26

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Elena Atanassova, Albena Paskaleva:
Breakdown fields and conduction mechanisms in thin Ta₂O₅ layers on Si for high density DRAMs. Microelectron. Reliab. 42(2): 157-173 (2002)

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