"Effect of microwave radiation on the properties of ..."

Elena Atanassova et al. (2005)

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DOI: 10.1016/J.MICROREL.2004.04.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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Elena Atanassova, Raisa V. Konakova, Vadym Fedorovych Mitin, J. Koprinarova, O. S. Lytvym, O. B. Okhrimenko, V. V. Schinkarenko, D. Virovska:
Effect of microwave radiation on the properties of Ta₂O₅-Si microstructures. Microelectron. Reliab. 45(1): 123-135 (2005)

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