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"The effect of nano-scale interaction forces on the premature pull-in of ..."

R. Ardito et al. (2012)

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DOI: 10.1016/J.MICROREL.2011.08.021

access: closed

type: Journal Article

metadata version: 2021-06-16

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R. Ardito, Attilio Frangi, Alberto Corigliano, Biagio De Masi, G. Cazzaniga:
The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems. Microelectron. Reliab. 52(1): 271-281 (2012)

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