"Chemical mechanical polishing of polymeric materials for MEMS applications."

Z. W. Zhong, Z. F. Wang, Y. H. Tan (2006)

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DOI: 10.1016/J.MEJO.2005.05.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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Z. W. Zhong, Z. F. Wang, Y. H. Tan:
Chemical mechanical polishing of polymeric materials for MEMS applications. Microelectron. J. 37(4): 295-301 (2006)

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