"Investigation of the degradation of smooth SiGe epitaxial layer on Si ..."

Shuqi Zheng (2008)

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DOI: 10.1016/J.MEJO.2007.10.028

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shuqi Zheng:
Investigation of the degradation of smooth SiGe epitaxial layer on Si substrate. Microelectron. J. 39(1): 53-56 (2008)

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