"Miniature SAW device using MEMS technology."

Amal Zaki, Hamed Elsimary, Mona E. Zaghloul (2007)

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DOI: 10.1016/J.MEJO.2006.11.010

access: closed

type: Journal Article

metadata version: 2021-10-14

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Amal Zaki, Hamed Elsimary, Mona E. Zaghloul:
Miniature SAW device using MEMS technology. Microelectron. J. 38(3): 426-429 (2007)

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