"Fabrication and characterization of stacked ZnO and ..."

Y. Zaatar et al. (2007)

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DOI: 10.1016/J.MEJO.2007.03.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Y. Zaatar, R. Al Asmar, J. Podlecki, S. Youssef, M. Abdallah, N. Ouaini, A. Foucaran:
Fabrication and characterization of stacked ZnO and ZnOGa₂O₃ layers for the realization of bulk acoustic wave resonated membranes. Microelectron. J. 38(4-5): 538-546 (2007)

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