"An embedded capacitive sensor for in-situ angular detection of micromotor."

Tianyu Yang et al. (2021)

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DOI: 10.1016/J.MEJO.2021.105088

access: closed

type: Journal Article

metadata version: 2024-10-06

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Tianyu Yang, Xiaoshi Li, Xiang-Yu Sun, Yi-Cheng Wang, Yu Chen, Dong-Dong Gong, Yijia Du:
An embedded capacitive sensor for in-situ angular detection of micromotor. Microelectron. J. 114: 105088 (2021)

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