"Design and fabrication of in-plane resonant microcantilevers."

Yuehua Wu et al. (2008)

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DOI: 10.1016/J.MEJO.2007.10.024

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yuehua Wu, Grigory Panaitov, Yi Zhang, Norbert Klein:
Design and fabrication of in-plane resonant microcantilevers. Microelectron. J. 39(1): 44-48 (2008)

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