"Center embossed diaphragm design guidelines and Fabry-Perot diaphragm ..."

Yan Sun et al. (2008)

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DOI: 10.1016/J.MEJO.2007.12.020

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yan Sun, Ganhua Feng, George Georgiou, Edip Niver, Karen Noe, Ken Chin:
Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor. Microelectron. J. 39(5): 711-716 (2008)

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