"Quantitative analysis of doping profile on beveled p-type GaAs structures ..."

R. Srnánek et al. (2008)

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DOI: 10.1016/J.MEJO.2008.02.019

access: closed

type: Journal Article

metadata version: 2022-10-02

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R. Srnánek, G. Irmer, D. Donoval, A. Vincze, B. Sciana, D. Radziewicz, M. Tlaczala:
Quantitative analysis of doping profile on beveled p-type GaAs structures by micro-Raman spectroscopy. Microelectron. J. 39(12): 1605-1612 (2008)

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