"A rule-based computing approach for the segmentation of semiconductor defects."

N. G. Shankar, Z. W. Zhong (2006)

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DOI: 10.1016/J.MEJO.2005.07.018

access: closed

type: Journal Article

metadata version: 2020-02-22

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N. G. Shankar, Z. W. Zhong:
A rule-based computing approach for the segmentation of semiconductor defects. Microelectron. J. 37(6): 500-509 (2006)

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