"Electrothermally actuated resonant rate gyroscope fabricated using the ..."

Rana I. Shakoor et al. (2011)

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DOI: 10.1016/J.MEJO.2010.05.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/ShakoorBBLH11
Rana I. Shakoor, Shafaat Ahmed Bazaz, M. Burnie, Yongjun Lai, M. M. Hasan:
Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs. Microelectron. J. 42(4): 585-593 (2011)

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