"Characterisation of titanium disilicide thin films."

Alexander Satka et al. (2006)

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DOI: 10.1016/J.MEJO.2006.06.004

access: closed

type: Journal Article

metadata version: 2022-10-04

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Alexander Satka, J. Liday, R. Srnánek, A. Vincze, Daniel Donoval, Jaroslav Kovác, Marián Veselý, Miroslav Michalka:
Characterisation of titanium disilicide thin films. Microelectron. J. 37(11): 1389-1395 (2006)

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