"Self-aligned vertical double-gate MOSFET (VDGM) with the oblique rotating ..."

Ismail Saad, Razali Ismail (2008)

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DOI: 10.1016/J.MEJO.2008.03.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ismail Saad, Razali Ismail:
Self-aligned vertical double-gate MOSFET (VDGM) with the oblique rotating ion implantation (ORI) method. Microelectron. J. 39(12): 1538-1541 (2008)

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