"PECVD grown Ge nanocrystals embedded in SiO2: From disordered ..."

Robby Peibst et al. (2009)

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DOI: 10.1016/J.MEJO.2008.11.008

access: closed

type: Journal Article

metadata version: 2024-06-17

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Robby Peibst, T. Dürkop, Eberhard Bugiel, Namil Koo, Thomas Mollenhauer, Max Christian Lemme, Heinrich Kurz, Karl R. Hofmann:
PECVD grown Ge nanocrystals embedded in SiO₂: From disordered to templated self-organization. Microelectron. J. 40(4-5): 759-761 (2009)

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