"Impact of etch angles on cell characteristics in 3D NAND flash memory."

Young-Taek Oh et al. (2018)

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DOI: 10.1016/J.MEJO.2018.06.009

access: closed

type: Journal Article

metadata version: 2023-11-12

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Young-Taek Oh, Kyu-Beom Kim, Sang-Hoon Shin, Hahng Sim, Nguyen Van Toan, Takahito Ono, Yunheub Song:
Impact of etch angles on cell characteristics in 3D NAND flash memory. Microelectron. J. 79: 1-6 (2018)

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