"A method for deep etching in dielectric films for 3D-chip and photonics ..."

B. Ramana Murthy, Rakesh Kumar (2004)

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DOI: 10.1016/J.MEJO.2004.07.004

access: closed

type: Journal Article

metadata version: 2020-02-22

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B. Ramana Murthy, Rakesh Kumar:
A method for deep etching in dielectric films for 3D-chip and photonics applications. Microelectron. J. 35(11): 909-913 (2004)

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