"A new approach for eliminating unwanted patterns in attenuated phase shift ..."

Moitreyee Mukherjee-Roy et al. (2003)

> Home

Details and statistics

DOI: 10.1016/S0026-2692(03)00195-2

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mj/Mukherjee-RoySMS03
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mj/Mukherjee-RoySMS03
Moitreyee Mukherjee-Roy, Navab Singh, Sohan Singh Mehta, G. S. Samudra:
A new approach for eliminating unwanted patterns in attenuated phase shift masks. Microelectron. J. 34(10): 965-967 (2003)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.