"High density plasma chemical vapor deposition of diamond-like carbon films."

Ana Paula Mousinho et al. (2003)

> Home

Details and statistics

DOI: 10.1016/S0026-2692(03)00065-X

access: closed

type: Journal Article

metadata version: 2020-02-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mj/MousinhoMMZ03
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mj/MousinhoMMZ03
Ana Paula Mousinho, Ronaldo Domingues Mansano, Marcos Massi, Luís da Silva Zambom:
High density plasma chemical vapor deposition of diamond-like carbon films. Microelectron. J. 34(5-8): 627-629 (2003)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.