"Built-in-self-test techniques for MEMS."

Salvador Mir, Libor Rufer, Achraf Dhayni (2006)

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DOI: 10.1016/J.MEJO.2006.04.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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Salvador Mir, Libor Rufer, Achraf Dhayni:
Built-in-self-test techniques for MEMS. Microelectron. J. 37(12): 1591-1597 (2006)

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