"Design of a micromachined thermal accelerometer: thermal simulation and ..."

Frédérick Mailly et al. (2003)

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DOI: 10.1016/S0026-2692(02)00194-5

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type: Journal Article

metadata version: 2024-03-01

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Frédérick Mailly, Augustin Martinez, Alain Giani, Frédérique Pascal-Delannoy, Alexandre Boyer:
Design of a micromachined thermal accelerometer: thermal simulation and experimental results. Microelectron. J. 34(4): 275-280 (2003)

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