"Characterization analysis of quality factor, electro-mechanical coupling ..."

Shitao Lv et al. (2022)

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DOI: 10.1016/J.MEJO.2022.105466

access: closed

type: Journal Article

metadata version: 2022-06-16

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Shitao Lv, Zheng Zhu, Fei Long, Haiyan Sun, Chenguang Song, Aoyu Zhang, Fazeng Tan, Jicong Zhao:
Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with f_s > 2 GHz. Microelectron. J. 125: 105466 (2022)

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