"Novel partial punch-through-stopper scheme for substrate leakage ..."

Huaizhi Luo et al. (2024)

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DOI: 10.1016/J.MEJO.2023.106065

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type: Journal Article

metadata version: 2024-01-29

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Huaizhi Luo, Yongliang Li, Fei Zhao, JiaYi Zhang, Yan Li:
Novel partial punch-through-stopper scheme for substrate leakage optimization of nanosheet field-effect transistors. Microelectron. J. 143: 106065 (2024)

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