"Thermal-sensitive BST thin film capacitors for dielectric bolometer ..."

Shi-Jian Liu, Xiang-Bin Zeng, Jun-Hao Chu (2004)

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DOI: 10.1016/J.MEJO.2004.02.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shi-Jian Liu, Xiang-Bin Zeng, Jun-Hao Chu:
Thermal-sensitive BST thin film capacitors for dielectric bolometer prepared by RF magnetron sputtering. Microelectron. J. 35(7): 601-603 (2004)

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