"Source/drain extension asymmetric counter-doping for suppressing channel ..."

Qingkun Li et al. (2024)

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DOI: 10.1016/J.MEJO.2024.106347

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type: Journal Article

metadata version: 2024-08-22

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Qingkun Li, Lei Cao, Qingzhu Zhang, Lianlian Li, Xuexiang Zhang, Chuqiao Niu, Guanqiao Sang, Yunjiao Bao, Huaxiang Yin, Zhenhua Wu:
Source/drain extension asymmetric counter-doping for suppressing channel leakage in stacked nanosheet transistors. Microelectron. J. 151: 106347 (2024)

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